In order to use machine micro vision technology to describe the motion state of MEMS devices moving at high speed, stroboscopic imaging technology can be introduced. Stroboscopic imaging technology comes from the principle of stroboscopic effect. The so-called stroboscopic effect refers to the visual impression that an object can stay for a certain period of time after disappearing in a person's field of view. The duration of the visual aftereffect is in the range of 1/5 to 1 / 20s under the general photometric conditions of the object. If the visual stimulus signal from the observed object is one signal after another, the interval between each two times is less than 1 / 20s, then the vision is too late to disappear, thus giving people the illusion of coherence. At this time, if flashing light is used to illuminate the periodically moving MEMS device, when the motion frequency of the MEMS device is equal to the flash frequency, it is equivalent to the flash lamp "frozen" at a certain position, so Exposure can get a clear image of the MEMS device in this phase.
Figure 1 shows the principle of stroboscopic imaging. Suppose you want to acquire a clear image of a high-speed moving MEMS device at zero phase. First, you can use a function generator to generate the narrow pulse signal required for illumination. The period of this signal is the same as the drive signal of the MEMS device and is synchronized at zero phase. That is, the position of the high level in each cycle should be consistent with the zero-phase position of the MEMS drive signal. Only in this way can the moving image of the MEMS device at zero phase be captured. In order to further optimize the lighting effect, the time of the high level of the lighting signal should be 100ns-1000ns. In this way, by using this illumination signal and driving the high-brightness LED through the strobe drive circuit so that it emits sufficient intensity of light, the CCD can be exposed multiple times at zero phase, thereby finally obtaining the desired fixed image.
It can be seen from the principle of stroboscopic imaging that in order to be able to acquire clear images of high-speed MEMS devices at different motion phases and different driving frequencies, a stroboscopic lighting circuit needs to be designed. Because the quality of imaging directly affects the subsequent extraction and analysis of the motion characteristics of MEMS devices, it has high requirements for LEDs. First of all, there must be sufficient strength, and there are high requirements for its stability and controllability.
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