The LED light source for exposure developed by Japan's Niuwei Motor was exhibited at "Semicon Japan 2011". Although the initial cost is higher than that of the previously used mercury lamp, the operating cost can be reduced due to the long service life. The heat is low, and energy saving and space saving can be realized. This product is expected to replace the previously used mercury (Hg) lamps. The company said it is ready to exploit applications that can take advantage of the characteristics of LED light sources.
According to the introduction of Niuwei Motor, the LED light source for exposure has been developed, and its own development has been completed. Currently, users are being explored. The LED light source can output light corresponding to a wavelength of a g-line (wavelength of 436 mm), an h-line (wavelength of 405 mm), and an i-line (wavelength of 365 mm) of a mercury lamp. The current light intensity is equivalent to a mercury lamp with an output of 750W. The LED light source is characterized by changing the light intensity ratio of the fixed g-line, h-line and i-line in the mercury lamp.
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